A CMOS-MEMS lateral-axis gyroscope

July 4, 2017 | Autor: Huikai Xie | Categoría: Vibrations, Atmospheric Pressure, Chip, Resonant Frequency
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Carnegie Mellon University

Research Showcase Robotics Institute

School of Computer Science

1-1-2001

A CMOS-MEMS lateral-axis gyroscope Huikai Xie Carnegie Mellon University

Gary K. Fedder Carnegie Mellon University, [email protected]

Recommended Citation Xie, Huikai and Fedder, Gary K., "A CMOS-MEMS lateral-axis gyroscope" (2001). Robotics Institute. Paper 321. http://repository.cmu.edu/robotics/321

This Conference Proceeding is brought to you for free and open access by the School of Computer Science at Research Showcase. It has been accepted for inclusion in Robotics Institute by an authorized administrator of Research Showcase. For more information, please contact [email protected].

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